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AAT's Information of Firm Klocke Nanotechnik (Germany)
Home Page Top What's new!Klocke Nanotechnik
Last Updated : March 2007 (partly revised July 2008)
Special Nanomotor delivered to the Laboratory of a major electric compnay in February and Nanomaipulator delivered to a university in March, 2007
We have gotten the order of the large Nanomotor with special PID boards to control the Z-axis for his own STM from a major electronic company and delivered in February. The Nanomanipulator is one product of Nanorobotics series developed by Firm Klocke Nanotechnik. A series of the Nanorobotics builds a bridge between nano-technology and the classical mechanical engineering. These products combine the advantages of both technologies: the backlash free movement with resolution of a millionth of a millimeter and the capability of kilograms of load at centimeters stroke. The expansion of the unique Nanorobotics series to a kit with more than 200 components allowed to form several stand alone instruments by configuration instead of development. They are: Dimensional SEM/FIB, e-beam Lithography stages, Wafer Probing Systems, SEM Field-emission, Automatic TEM lamella handling, SPM Lithographer, Microassembly starter kit and so on. Of course these products are used for the other applications. However several turnkey solutions without the delivered papers for new applications were realized - but they are to a certain level confidential.
In Japan the Nanomotors themselves were used at laboratories of government offices and universities for single application combined with electron microscopes except the Nanomanipulators delivered to the Japanese manufactures of the electron microscopes. But this time we delivered the XYZ-Nanomanipulator of the Nanorobotics series to a university in March. We will pay attention to see its application. The 3 each table will be able to assemble a XYZ-Nanomanipulator as the photo of the upper right side.
  
Firm Klocke Nanotechnik has opened his web site as "The 3D-Nanofinger".
 Home Page of Firm Klocke Nanotechnik
Home Page of the 3d-Nanofinger from Firm Klocke Nanotechnik
Last Updated : December 2003
Visit to Firm Klocke Nanotechnik
At the end of November we visited 4 companies in Germany as Klocke Nanotechnik, Wilh. Lambrecht GmbH, Kappa opto-electronics GmbH and nanotools GmbH. We had meaningful meetings with them and we want to use theses experiences to support customers.
Klocke Nanotechnik : In Japan there is no suitable nanotechnology elements which act in an electron microscope under the low temperature, then the Nanomotors are used as one of actuators by some researchers. However the Nanomotor® cannot be easily applied in some cases and then this application needs a know-how. For this purpose we visited Klocke Nanotechnik, which locates in the industry area near the border of Belguim and the exit of the Autobahn in the suburb of Aachen.
 At the front of the Fair's panel by the main door; from left to right:
Dr. Volker Klocke
Dr. Andreas Rosenberger
Dipl. Ing. Jürgen Königs
According to Dr. Klocke the application of his NMT modules is getting bigger market. It is because the NMT modules are easy to use and we have seen some NMT stages with PMS (Position measuring System) under the final factory check. These NMT stages can be used in any position, vertically and/or horizontally, and driven with fine and /or rough positioning. The movement is very comfortable.
We were taught some remarks during the movement of Nanomotor itself and gotten the information about the lifetime of the Nanomotor. We understand that the system sales are the priority over the sales of the Nanomotor itself, but we told Dr. Klocke that we should help also researchers who have problems in nano-technology.
 If you need English Technical Information (about Nanomotor's lifetime), please ask us by E-mail !
Home Page of Firm Klocke Nanotechnik
Last Updated : September 2003
Klocke Nanotechnik's Products List
"The step from micro-technology to nanotechnology requires more than a reduction of size by a factor of a thousand. If you want to move precisely in the nano-world, you don't succeed by perfecting proven techniques.".....Handelsblatt
For Researcher, who is interested in Nanotechnology and Biotechnology...
In the field of Nanotechnology and Biotechnology micro target parts have to be seen. If you have any Electron Microscopes, the Nanomanipulator (compatible with UHV and ULT) will be helpful to you. Then the electron microscope will be changed to material processing unit from material analyzing unit. If you don't have an electron microscope but you have micro target parts in mind, then please contact us about micro-assembly and micro production. Surely we will help you.
If you want to know about the Nanomotor at first, please click here !
Firm Klocke Nanotechnik in Germany standardizes their "Components" for Nanorobotics which consist of thier basic part, the patented Nanomotor®. The "Systems" are Nanorobotics products and consist of Nanorobotics Components. All Nanorobotics products are controlled by the Network Controller (NWC). Using these Nanorobotics products there are many solutions and applications for the customers' requirements.
Productions Summary
| Components | Basic Part "Nanomotor"
Basic Part "Table"
Basic Part "Gripper"
Basic Part "Manipulator"
Baisc Part "Mini-STM" |
| Nanorobotics | Basic Part "NMT Table Module"
"Positioning Table"
Basic Part "NMG Gripper"
"XYZ Manipulator"
"Manipulator with Force Feedback" |
| Electronics | Basic Part "Network Controller (NWC)"
Basic Part "High Voltage Amplifier" |
| Micro Production System | "Micro Assembly Stage"
"Micro Production System" |
| Scanning Probe Microscopy(SPM) | "Scanning Probe Heads"
"Mini-XYZ Manipulator Scanning Probe Heads"
"Nano Hammer; the SPM as a tool" |
| Nanorobotics for Electron Microscopy | "Nanorobotics Manipulator"
"Wafer Probing Manipulator"
"Machining Manipulator"
"Manipulator for TEM's sample preparation" |
| Components |
Basic Part "Nanomotor"
 | 3 Standard Sizes
 Small Nanomotor (NMS)
Long Nanomotor (NML)
Big Nanomotor (NMB)
Option
1. Add-on the second carrier tube
2. Conditions for Non-magnetic, UHV(10-12hP), LT(4.4K) and so on
3. Internal Isolation for a electric carrier tube
4. STM function, wire for tunneling current
may be combined with above conditions.
Nanomotor |
Basic Part "Table"
 | There are NMT tables for Nanorobotics, but the requirements are robustless and small space. Then this open-frame table is suitable and this table is drven by 2 small Nanomotors. The dimension of this table is 45x45x5.5mm and the stroke is 5mm. When using large Nanomotors, then the dimension is 67x67x9mm and the stroke is 10mm. Combined with these tables, there is a free space of 20x20mm in the center of the table. And so this table is used as XY table for a Optical Microscope for transmission use. This is used for "Axiovert" of Carl Zeiss Optical Microscope. |
Basic Part "Gripper"
 | Micro assembly is realized only using precise grippers. The gripping forces can be increased extreamly sensitivly when gripping a micro part. The standard one is a Planar Gripper and there are 2 kinds of grippers, NMG-S combined with the small Nanomotor and NMG-B combined with the big Nanomotor. The stroke of the former gripper is 0.7mm and the gripping force is 20mN, and the latter is 1.5mm and 150mN respectively.
Microgripper |
Basic Part "Manipulator"
 | The Nanomanipulator is consisting of a tilting table moved by 4 small Nanomotors over mechanical links and the central big Nanomotor for Z movement. The resolution is 1nm and the stroke is 5x5x19mm. The outer dimension is 25mm with the housing diameter and the length is 48mm.
Nanomanipulator
SEM-Manipulators |
Basic Part "Mini-STM"
 | This is the world's smallest commercial scanning tunneling microscope (STM) with atomic resolution. Its heart is formed by the Nanomotor. The sample lies on top of three balls mounted on the scanner tube. The complete Mini-STM fits under a thimble and is thus very insensitive to environmental vibrations. No additional vibration damping systems are needed.
Scanning Probe Microscopy |
| Nanorobotics |
Basic Part "NMT Table"
"Positioning Table"
 | A new set of motorized tables developped by Klocke Nanotechnik allow high strokes at small volumes. The NMT modules are driven with the smallest and most precise linear motor, the Nanomotor. Loads are up to 2 kg can be moved over centimeters of stroke with down to 2nm resolution. They are many types, one is a horizontal movement with 10-70mm stroke, another is a vertical movement with 10-20mm stroke.
NMT Modules
Using these NMT table modules, the positioning tables are made without backlash and manipulation in many degree of freedom is possible. In most of these NMT table modules the position measurement systems can be included without increasing the size. The resolution of the position sensor is better than 10nm.
Using wide range of options as gripper and etc., all NMT table modules expand their applications from linear motion to micro assembly stages.
Nano-precise positioning (Schneeberger2000) |
Basic Part "NMG Gripper"
 | NMG Grippers are combined with NMT modules and grippers. They are integrated always with Manipulators and/or positioning tables, then used in handling and assembly line. The gripper is driven by the Nanomotor and they are controlled by the same electronics and software.
Nanorobotics for Micro Production Technology |
"XYZ Manipulator"
 | The XYZ Manipulator is made by 3 small linear stages and moves perpendicularly each axis independently. They are many strokes combined the different NMT table modules. The position measurement systems with resolution of 10nm can be added then can be displayed the absolute values.
SEM-Manipulators |
"Manipulator with
Force Feedback"
 | The unit includes a manipulation stage for three dimensional movement combined by 3 NMT modules, a tip, the calibrated force sensor for measuring the applied force and force feedback joystick. If the stage is used in coarse step mode it is possible to induce very high pressure, even imprints in diamond surfaces can be made.
Nanomanipulation with Forcr Feedback
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| Electronics |
Basic Part
"Network Controller (NWC)"
Basic Part
"High Voltage Amplifier"
 | For controlling the Nanomotor and Nanomotor-based products the Network Controller (NWC) is available with Ethernet based solutions. The NWC controls 4 external Nanomotors using a standard software of Klocke Nanotechnik, and then they have inputs for position measurement systems with optional feature.
The High Voltage Amplifier drives the Nanomotor under LT (4.4K) condition and is ideal for SPM application.
Electronics for Nanomotor Control |
Micro
Production
System |
"Micro Assembly Stage"
 | It is used for assembly of Terahertz Frequency Mixers. The total dimension of the fused quartz mixer substrates have to be 80µm wide x 35µm height and 2000µm long. The driving Nanomotor is added force limit and can grip the sample sensitively.
Micro Assembly with Nanometer Resolution
Assembly and Calibration with Nanometer-Precision |
"Small XY Stage
Micro Production System"
"Large XY Stage
Micro Poduction System"
| Klocke Nanotechinik and his partners develop a Micro Production System which bridges the gap between nanotechnology and the classical mechanical engineering. It combines the advantages of both technologies: the backlash free movement with nanometer resolution and the capability of of up to kilograms of load at huge strokes. The included Nanorobotics modules offer plenty degrees of movement and a repeatability of better 50nm, a value far away from the micrometer values of classical production systems. From a 4 axis micro assembly stage and other options like adhesive bonding dispenser are added to th basic stage, then the micro production system is made. There are 2 kinds of systems; small XY table with 100x100mm and large XY table with 350x350mm. Further adding the vision system the pattern recognition is also made. The Micro Production System combined with the Nanorobotics modules will lead to develop new high resolution production processes.
Nanorobotics for Micro Production Technology
Micro Adhedive Bonding
Vision System: Pattern Recognition and Quality Control |
Scanning
Probe
Microscopy
(SPM) |
"Scanning Probe Heads
for Electron Microscopy"
"Mini-XYZ Manipulator
Scanning Probe Head
for Electron Microscopy"
 | The Scanning Probe Heads are available for the basic part of Scanning Probe Microscopy (SPM) as STM, AFM, MO-SNOM. The Piezo tube is for XY scanning range of 20x20µm and the Nanomotor integrated inside the tube is used for Z-approach of sensors or tools toward the sample. Z stroke is 20mm and sub-nanometer resolution in fine positioning range of 1µm. This scanning probe head is used in the microscope chamber, and now the function extends not only analytic device but also as a tool for modifying surfaces.
Scanning Probe Heads
This is a mini-XYZ manipulator and combined with a XY stage of NMT modules and the Nanomotor for Z movement. This unit is integrated in a pipe of 30mm diameter and the stroke is 4x4mm, is developed for LT application. |
"Nano-Hammer
The SPM as a Tool"
 | The Scanning Probe Microscope (SPM) cannot only image surfaces, its tip can be also used to process the surface and produce nano-structures. The standard cantilever tip sitting on a flexible arm can only apply small forces. A Piezo tube scanner performs the movement in XY directions parallel to the surface. The Z movement of the tip is realized by a Nanomotor inside of the tube scanner. The sample holder is fixed by 2 clamps on top of a small Nanorobotics XY stage. The detection of the sample surface with a shearing force sensor decouples the sensitive sensor from the movement of the tool toward the sample. The maximum force of a typical cantilever is about 0.3mN. The shear force of this SPM is defined by the Z Nanomotor, between 0.3-0.35N. Therefore the maximum force is 1000 times bigger than standard cantilever's.
The SPM as a TOOL; the Nano-Hammer |
Nanorobotics
for
Electron
Microscopy |
"Nanorobotics
Manipulator"
 | The Electron Microscopes and/or Ion Microscopes (FIB) have wide application range. Nanorobotics Manipulators of Klocke Nanotechinik should fit in range and resolution. For an effective usage of manipulators a sufficient set of accessory is available. If there is a unused flange, even if there is no enough space in a microscope chamber and you have problems, please consult us. We may offer you a solution from a part system to complete system from the beginning.
Nanorobotics Manipulators for "every" Microscope
Sample Stages |
"Wafer Probing
Manipulator"
"Conductive Cantilever Tip
touching a line on a wafer
 | The actual small wafer structures can be observed only in 2 types of electron microscopes as the AFM expanded to a Wafer Prober or the SEM equipped with Wafer Prober. However the AFM cannot resolve structures that are only 2-dimensional, and an AFM has a typical maximum scanning range of about 20x20µm. It can take hours to find a certain sample position. The SEM can zoom from cm2 sized areas into a few 10nm2 sized area within a few second. And any kind of structures are visible in a SEM. Therefore the Wafer Probing in a SEM is the best solution. A high-end SEM is not required, any (older) SEM can be used for this application.
Wafer Probing System for Electron Microscopes
Nanorobotics Manipulator as a wafer prober |
"Machining
Manipulator"
 | The Electron Microscope Manufacturer, LEO in Germany (Carl Zeiss Group), installed the compact Nanomanipulator of Klocke Nanotechnik into his SEM and extend the SEM a analytical instrument to a material processing system. Within the microscope chamber the Nanomanipulators are mounted on an additional flange on the door, pointing towards the sample stage. If this door is closed, this SEM and the Nanomanipulators make a powerful tool as a workbench.
Processing material in LEO Electro Microscopes... |
"Manipulator for
TEM's Sample Preparation"
"Lifting the etched lamella
after break with
the Nanomanipulator"
 | The defect of sub-micrometer over 300mm wafer makes problems in the semiconductor industry. The surface measurement of a wafer by the SEM reaches the limit and the structural defects should be inspected by a high-resolution Transmission Electron Microscope (TEM). This requires to cut a very small and thin lamella out of the defective area. However TEM's sample is only made a specialist using complex preparation techniques and a small electron-transparent lamella has to be cut out from the wafer or LSI. Recently it is convenient to use a FIB which allows to remove micrometer-sized area of the sample by physical ion sputtering while the surface is simultaneously inspected by induced electron microscopy. And after that the Nanomanipulator breaks and lift it into the sample holder.
Preparation of TEM-samples |
The above underlined materials are prepared for Japanese PDF-files, and please ask us per E-mail telling the tytle.
If you have questions about Nanomanipulation in an electron microscopes, ...
Please ask us or ask Klocke nanotechnik of Germany in English.
We are waiting for your questions and we will find a solution.
Ask to Klocke Nanotechnik in English, please click here !
Ask us in Japanes, please click here !
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Last Updated : July 2003
Renewal of Klocke Nanotechnik's Home Page
Firm Klocke Nanotechnik renewed their Home Page and add new information and materials in March 2003.
"Piezo driven linear motor developed:
The step from micro-technology to nanotechnology requires more than a reduction of size by a factor of a thousand. If you want to move precisely in the nano-world, you don't succeed by perfecting proven techniques.".....Handelsblatt
Business Segments
Over ten years of experience and after the successful development of different complete systems Klocke Naotechnik moved their former standard products to the business segment "Components" and added the new field "Systems". The redesign and expansion of their new web pages include these changes. These systems include plenty of different options that can only be summarized here. More information is available on request. Besides their business segment "Systems" offering complete turnkey solutions their well-known Nanorobotics and Nanomotor products are now summarized in the business segment "Components".
From left to right : Products from Each Component and System
 
For Researcher, who is interested in Nanotechnology and Biotechnology...
In the field of Nanotechnology and Biotechnology micro target parts have to be seen. If you have any Electron Microscopes, the Nanomanipulator (compatible with UHV and ULT) will be helpful to you. Then the electron microscope will be changed to material processing unit from material analyzing unit. If you don't have an electron microscope but you have micro target parts in mind, then please contact us about micro-assembly and micro production. Surely we will help you.
Last Updated : July 2003
PDF-files about products according to the component groups
Components (1)Baisc Products
Nanomotor
The Nanomotor, data sheet
"Atomic precision and Millimeter range" (F&M 96).....general information
"Motion from the Nanoscle World" (MST-news99).....general information
"Motion from the Nanoscle World" (Springer-verlag 2002).....general information
Nanorobotics for Micro Production Technology (SPIE 2002).....general information(incl. micro production), overlap(1)
Tables
"Nano-precise Positioning" (Schneeberger 2000).....overlap(2)
Sample Stages.....overlap(3)
Manipulators
SEM-Manipulators.....overlap(4)
The Nanomanipulator
Nanomotors for Liquid Handling (Innovation 99)
Grippers
The Microgripper, data sheet.....overlap(5)
STM
Scanning Probe Microscope.....overlap(6)
Components (2)Nanorobotics
NMT Positioning tables
NMT modules, data sheet
"Nano-precise Positioning" (Schneeberger 2000).....overlap(2)
Position measurement
Sample Stages.....overlap(3)
SEM-Manipulators.....overlap(4)
NMG Gripper modules
The Micro Gripper, data sheet.....overlap(5)
XYZ Manipulator
SEM-Manipulators.....overlap(4)
Nanorobotics manipulator as a Wafer prober; Measurements in a Scanning Electron Microscope.....overlap(7)
Nanorobotics Manipulators.....overlap(8)
Force Feedback Manipulator
Nanomanipulation with Force Feedback
Microassembly stage
"Microassembly with Nanometer Resolution - Assembly of Terahertz Frequency Mixers" (KOSMA)
Assembly and Calibration with Nanometer-Precision" (Spindler & Hoyer)
Components (3)Electronics
NWC Network Controller
Network Controller (NWC - including Position measurement)
Systems (1)Micro Productin System
Micro Productin System.....Micro Production System
Micro Adhesive Bonding in Products and Service
Vision System; Pattern Recognition and Quality Control
Nanorobotics for Micro Production Technology (SPIE 2002).....general information(incl. micro production), overlap(1)
Systems (2)Nanorobotics for Electron and Ion Microscopes
Nanorobotics manipulators for "every" Microscope.....A must-see for the Electron Microscopes
Scanning Probe Microscope.....overlap(6)
Wafer Probing System for Electron Microscopes
Nanorobotics manipulator as a Wafer prober; Measurements in a Scanning Electron Microscope.....overlap(7)
Nanorobotics Manipulators.....overlap(8)
Processing material in Electron Microscopes (LEO)
Preparation of TEM-Samples (Fraunhofer)
The SPM as a Tool, The "Nano-Hammer"
Systems (3)Scanning Probe Microscopy
Scanning Probe Microscope.....overlap(6)
Scanning Probe Heads; Summary of Nanomotor driven SPM-Heads
The above all materials are prepared for Japanese PDF-files, and please ask us per E-mail telling the tytle.
Reference list in Japan
For the standard use the 'Nanomotor'® was delivered to Graduate School of Nagoya University, and for the Electron Microscopy the 'Nanomotor'® were delivered to The Research Center for Ultra-High Voltage Electron Microscopy of Osaka University, Graduate School of Tokyo Institute of Technology, National Institute for Material Science and Tokyo University of Science. Some inquiries are made by people of laboratories, universities and companies, who are interested in manipulation in the Electron Microscopes. The original Nanomanipulator was also delivered to an optical manufacturer in Japan a few years ago.
Last Updated : July 2003
Explanation about "Nanomotor®"
The Nanomotor is a patented piezoelectric linear motor, with atomic resolution. Dr. Klocke and his team developed the Nanomotor since 1992. One of the elder articles about this motor and some applications is published in the German Magazine [F&M] 1996. Further applications are described in the Magazine [MST-news, 1999], and in 2002 articles were published including complete micro production systems based on the Nanomotor and the Nanorobotics series developed by Klocke Nanotechnik.
Several different types of the Nanomotor are available. The Nanomotor can be operated at UHV (10-11hPa) and Low Temperature (4.4k) conditions and is used as a part of Scanning Probe Microscopes: it is ideal to form small Probe Microscope heads. And it's the basis for a complete series of Nanorobotics for Scanning Electron and Ion Microscopes. The Nanorobotics series combine the Nanomotor with components from classical mechanical engineering like ball bearing tables and gears. The resulting devices are as strong as bearings and as precise as the Nanomotor: kg of load can be moved within centimeters of stroke at 1 nm resolution. The Nanorobotics series includes the smallest and most precise linear stage available in the market, called NMT Module. The sample stage is also available. In the NMT modules a position measurement with closed-loop can also be mounted. A Microgripper of this series (NMG) can be added to these stages to form small micro assembly systems. Adding more and more Nanorobotics lead to complete Micro Production Systems, probably the most precise production cells available in the market !
Klocke Nanotechnik offers complete solutions for Nanorobotics in Scanning Electron and Ion Microscopes since 1998. Since 1999 LEO (now; Carl Zeiss Group) sells Nanomanipulators as OEM products with their SEMs (SEM-manipulators) to expand the SEM functions to machining and testing. These Nanomanipulators can be used to prepare a thin TEM lamella. the NMT modules of the Nanorobotics series from XYZ Manipulators fitting into "any" SEM. In-situ Wafer Probing Systems from Klocke Nanotechnik are key products to make current measurements on sub-90nm structures with e.g. 3 probe tips within a diameter of a few 100 nm. The process is visualized by the SEM. The usage of Nanorobotics manipulators in a SEM is described in a report.
Nanomanipulation with Force Feedback is another example, e.g. to engrave a surface like with a "Nano-Hammer", or Nanomanipulators for Liquid handling. These products are further used for a micro bonding technique and as Assembling Units with nm-resolution of the devices or as Universal Testing Bench, up to complete Micro Production Systems, also described in "Nanorobotics for Micro Production Technology". In the Micro Production Systems a Vision System using pattern recognition is also included. The Nanomotor is controlled via Ethernet by a Network Controller (NWC).
The above underlined materials are prepared for Japanese PDF-files, and please ask us per E-mail telling the tytle.
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